Submicron Mapping of Thermal Conductivity of Thermoelectric Thin Films

A tool for evaluating thin-film thermal conductivity to submicron spatial resolution has been developed. The micro-instrumentation utilizes the thermoreflectance (TR) technique to characterize thermal conductivity and material uniformity. The instrument consists of a heating element for creating temperature gradients and an Invar bar with in situ temperature monitoring for heat flux measurements. The thin-film sample is sandwiched between the heater and Invar bar while a microscope is used to direct light onto a crosssection of the sample and reflected light is collected with a camera. By using this technique, we can achieve submicron spatial resolution for thermal conductivity and eliminate contributions from thermal contact resistance, thereby also eliminating the need for sample preparation other than cleaving. The method offers temperature resolution of 10 mK, spatial resolution of 200 nm, and thermal conductivity measurement with 0.01 ± 0.001 W/mK resolution. The thermal conductivity of a 0.6% ErAs:InGaAlAs thermoelectric (TE) element, prepared by molecular beam epitaxy (MBE) growth, obtained with the new instrument is 2.3 W/mK, while the average thermal conductivity obtained with the 3-omega method is 2.5 W/mK. Energy-dispersive x-ray (EDX) spectroscopy is also used to prove that the elemental composition has uniformity consistent with the material variation observed by the TR technique. Moreover, a temperature profile across a 0.6% ErAs:InGaAlAs TE element on InP substrate is imaged. Two different slopes, corresponding to different thermal conductivities, have been observed, showing that the thermal conductivity of the TE element is lower than that of the InP substrate as expected.